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Read e-book online Advanced Ta-Based Diffusion Barriers for Cu Interconnects PDF

By Rene Hubner

ISBN-10: 1604564512

ISBN-13: 9781604564518

ISBN-10: 1607416751

ISBN-13: 9781607416753

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Extra info for Advanced Ta-Based Diffusion Barriers for Cu Interconnects

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The characterization of the layer structure was performed using X-ray reflectometry (XRR) as well as X-ray diffraction (XRD) at a small incidence angle 26 René Hübner or in Bragg-Brentano geometry (θ-2θ scans). For layer stacks, XRR experiments provide information about the film thicknesses, the interface roughnesses, and the depth profile of the electron density. Besides the determination of the degree of crystallinity, XRD investigations are suitable to analyze phase composition, lattice parameters for each crystalline phase, crystallite size, texture, and lattice strains.

0 Scattering angle θ [°] (b) Cu/Ta30Si18N52/SiO2/Si 8 10 6 Reflectivity [arb. units] 10 4 10 2 10 600°C/64h 0 10 600°C/16h -2 10 600°C/4h -4 10 600°C/1h -6 10 as-dep. 0 Scattering angle θ [°] Figure 15 (a) reprinted from reference [237] with permission from Elsevier. Figure 15. XRR curves for the Cu/Ta73Si27/SiO2/Si sample (a) and the Cu/Ta30Si18N52/SiO2/Si sample (b) in the as-deposited state and after annealing at T = 600 °C for several times t (solid lines: experimental data, dotted lines: fit results).

70 60 50 40 30 20 10 0 Ta73Si27 Ta62Si20N18 Ta56Si19N25 Ta41Si20N39 Ta30Si18N52 Diffusion barrier Figure 5. Chemical composition of the as-deposited Ta-Si-N layers determined by RBS. To characterize the morphology of the Ta-Si-N layers deposited between copper and thermal oxide, XRR experiments were carried out (Figure 6). 8 gcm-3. All Ta-Si-N layers are characterized by a higher mass density. 0 gcm-3. The oscillations in the XRR curves are associated with the Cu film and the barrier layer. They allow for the determination of the corresponding film thicknesses as well as the evaluation of the interface roughnesses.

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Advanced Ta-Based Diffusion Barriers for Cu Interconnects by Rene Hubner


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